JPS60230033A - 多点モニタリングサンプラ− - Google Patents
多点モニタリングサンプラ−Info
- Publication number
- JPS60230033A JPS60230033A JP8739984A JP8739984A JPS60230033A JP S60230033 A JPS60230033 A JP S60230033A JP 8739984 A JP8739984 A JP 8739984A JP 8739984 A JP8739984 A JP 8739984A JP S60230033 A JPS60230033 A JP S60230033A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- air
- sensor connection
- pressure
- connection socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012544 monitoring process Methods 0.000 title claims description 10
- 238000005070 sampling Methods 0.000 claims description 17
- 238000009423 ventilation Methods 0.000 claims description 7
- 239000000428 dust Substances 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 8
- 239000000203 mixture Substances 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8739984A JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8739984A JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60230033A true JPS60230033A (ja) | 1985-11-15 |
| JPH0418617B2 JPH0418617B2 (en]) | 1992-03-27 |
Family
ID=13913790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8739984A Granted JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60230033A (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129733A (ja) * | 1985-12-02 | 1987-06-12 | Fujita Corp | 気体の多点サンプリング装置 |
| WO2001006333A3 (en) * | 1999-07-16 | 2001-08-02 | Particle Measuring Syst | Particle sensing system and associated methods |
-
1984
- 1984-04-27 JP JP8739984A patent/JPS60230033A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129733A (ja) * | 1985-12-02 | 1987-06-12 | Fujita Corp | 気体の多点サンプリング装置 |
| WO2001006333A3 (en) * | 1999-07-16 | 2001-08-02 | Particle Measuring Syst | Particle sensing system and associated methods |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418617B2 (en]) | 1992-03-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5520234B2 (ja) | 基準測定法に基づく吸込み式漏れ検出器 | |
| US3803921A (en) | Sampling and flow measuring device | |
| US10514315B2 (en) | Sensor unit and airtightness inspection device | |
| CN102405450A (zh) | 用于在卫生生产线中监测多个参数的多端口在线流通单元 | |
| TWI484152B (zh) | Manifold unit and the use of this type of flow-type leak test machine | |
| JPS60230033A (ja) | 多点モニタリングサンプラ− | |
| JPS62170842A (ja) | プロ−ブ発信器 | |
| CN205877729U (zh) | 管路泄漏检测装置 | |
| KR102434175B1 (ko) | 매니폴드형 파티클 측정장치 | |
| JPS60230032A (ja) | 多点モニタリングサンプラ− | |
| CN207007036U (zh) | 一种斜孔位置度检具 | |
| JPH0532764Y2 (en]) | ||
| JPS59182329A (ja) | 漏れ検知器及びその方法 | |
| CN210834148U (zh) | 一种用于套圈生产的检测设备 | |
| CN215930822U (zh) | 转动气动量仪 | |
| CN214407886U (zh) | 一种可视化多角度测量的气检夹具 | |
| JPH0136135Y2 (en]) | ||
| CN214199886U (zh) | 一种销孔检具 | |
| KR100187440B1 (ko) | 멀티 프로브 파티클 측정 장치 | |
| CN206772193U (zh) | 一种快速检测光纤环骨架内腔孔距及尺寸的辅助检测工具 | |
| CN222652446U (zh) | 一种仪表转接头组件及压力校验设备 | |
| CN221802848U (zh) | 一种工件壁厚快速检测装置 | |
| CN212646015U (zh) | 换向阀及具有该换向阀的测漏装置 | |
| CN221667202U (zh) | 一种显示屏密封性检测装置 | |
| JPH09189637A (ja) | 化学蒸着装置およびそのガスマニホールドの漏れ検出方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |